Texture of Electroplated Copper Film under Biaxial Stress
نویسندگان
چکیده
منابع مشابه
Stress-induced Migration of Electroplated Copper Thin Film Interconnections Depending on Thermal History
Effect of the change of crystallinity and micro texture of electroplated copper thin films by annealing on the stressinduced migration was investigated experimentally and theoretically. The micro texture of electroplated copper thin films changed drastically as a function of their electroplating conditions and the annealing temperature after the electroplating. The crystallinity of the electrop...
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ژورنال
عنوان ژورنال: MATERIALS TRANSACTIONS
سال: 2006
ISSN: 1345-9678,1347-5320
DOI: 10.2320/matertrans.47.2299